Design Simulation and Analysis of Polysilicon- based CMOS Micromachined Piezoresistive Microcantilever for Glucose Sensing

The measurement of glucose is of great importance in clinical diagnosis. This is especially essential for the continuous monitoring for example in a patient suffering from diabetes mellitus which is caused by the high levels of glucose in human physiological fluid. Even though many research have been done for glucose measurement, there are still many research in progress to develop new methods and technologies for sampling, detecting and monitoring glucose levels. This work has focused on the design simulation analysis of a Polysilicon-based CMOS micromachined Piezoresistive Microcantilever beam for glucose sensing application. In principle, adsorption of glucose on a functionalized surface of the microfabricated cantilever will cause a surface stress and consequently the cantilever bending. In this paper, the microcantilever beam is constructed and bending analysis is performed so that the beam tip deflection could be predicted. The device model was simulated using CoventorWare, a commercial finite element analysis (FEA) tool designed specifically for MEMS applications. The structural variation of the piezoresistors designs on cantilever beam is also considered to increase the sensitivity of the microcantilevers sensor since the forces involved is very small. Keywords-Piezoresistive, Microcantilever, Glucose, MEMS, CMOS